W203 220 cdi Excessive vibration at idle

[Faruk26]

Hello. My car shakes excessively at idle. Especially when it's cold. It's better when it's hot. I replaced the Engine Mounts but the problem persists. Also, the idle speed is 820rpm. Egr valve canceled. It does not give any fault code. Om611 engine 2002 models. What do you think I should do? Can you help me? Thank you very much.